1.3MP SWIR Camera (SONY IMX990)
0.32MP SWIR Camera (SONY IMX991)
This camera has InGaAs sensor (IMX990 / IMX991) which Sony released in May 2020 and supports wide wavelength range from visible light to SWIR (400nm to 1700nm). This camera is suitable for inspecting pattern of silicon wafer from back side.
[USB3 Type]
| Model | SDV-990A-USB3 | SDV-991A-USB3 |
| Sensor | SONY :IMX990 | SONY: IMX991 |
| Resolution | 1280(H) x 1024(V) | 640(H) x 512(V) |
| Pixel size | 5um x 5um | 5um x 5um |
| Scan area | 6.4mm x 5.12mm (Diagonal = 8.2mm) | 3.2mm x2.56mm (Diagonal = 4.1mm) |
| Interface | USB3.0 | USB3.0 |
| Shutter | Global shutter system | Global shutter system |
| Available wavelength | 400nm – 1700nm | 400nm – 1700nm |
| Frame rate | 12bit ( Maximum 72fps) | 12bit ( Maximum 137fps) |
| SNR | 51dB | 51dB |
| Power | Input voltage : DC 12V | Input voltage : DC 12V |
| Lens mount | C mount | C mount |
| Operation temperature | 10 ～40℃ | 10～40℃ |
| Storage temperature | 0～60℃ | 0～60℃ |
| Dimension | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) |
[Camera Link type]
| Model | SDV-990A-CL | SDV-991A-CL |
| Sensor | SONY :IMX990 | SONY: IMX991 |
| Resolution | 1280(H) x 1024(V) | 640(H) x 512(V) |
| Pixel size | 5um x 5um | 5um x 5um |
| Scan area | 6.4mm x 5.12mm (Diagonal = 8.2mm) | 3.2mm x2.56mm (Diagonal = 4.1mm) |
| Interface | Camera Link | Camera Link |
| Output connector | SDR26pin | SDR26pin |
| Shutter | Global shutter system | Global shutter system |
| Available wavelength | 400nm – 1700nm | 400nm – 1700nm |
| Exposure time | 20.3um sec – 2 sec | 20.3um sec – 2 sec |
| Frame rate | 12bit ( Maximum 72fps) | 12bit ( Maximum 137fps) |
| SNR | 51dB | 51dB |
| Power | Input voltage : DC 12V | Input voltage : DC 12V |
| Lens mount | C mount | C mount |
| Operation temperature | 10 ～40℃ | 10～40℃ |
| Storage temperature | 0～60℃ | 0～60℃ |
| Dimension | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) |
Graph showing wavelength and relative quantum efficiency of the above models
Example of use (IR microscope)
>> SIS-150 series (Infrared halogen light)
>> PE IR series (Objective lens for NIR)
>> PE IR 2000 series (Objective lens for SWIR)
>> MS-200-IR1700 (Coaxial tube for SWIR)
The following pictures show the images of viewing silicon wafer from back side by irradiating with different light.
Other example of use
