μ LED Exposure

 

[Overview]
This equipment can pattern μ-LED-Chip with 2μm resolution.
is a projection optical Exposure system that supports rib structures.

[Use]
The patterning for μ-LED Chip

[Specification]
Target size ：Max 6 inch
Alignment Accuracy：±0.5μm
Transfer ：Manual or Automatic
Option : Mask Changer / Backside Alignment